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Turbo Pump Capacity : Max x 1*10 Torr |
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Leak test structure |
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Displaying the degree of vacuum profile
(vacuum values can be adjusted) |
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Chamber Door auto Open/Close |
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Each step Sensing Profile display |
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Strong vacuum welding type |
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20 steps of operation mode for each stage and
condition |
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Chamber pressure 0.000001 at display |
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Adjustable working hours |
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Displaying all equipment working conditions |
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Easy maintenance of a sealing bar |
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Checking stability of products on each floor |